Modeling and performance evaluation of cluster tools using Petri nets 
basic models
Zuberek, W.M.
in: Emerging Technologies, Robotics and Control Systems, vol.3,
ed. S. Pennacchio; International Society for Advanced Research, Palermo,
Italy, pp.5967, 2009 (ISBN 9788890192876).
Abstract:
A cluster tool is an integrated manufacturing system consisting of process,
transport, and cassette modules, mechanically linked together, that is used
in manufacturing of semiconductor chips. Because of high throughput
requirements, cluster tools perform a number of activities concurrently.
Petri nets are formal models developed specifically for representation of
concurrent activities and for their coordination. In timed nets, the durations
of modeled activities are represented by occurrence times associated with
transitions, and this allows to study the performance characteristics of the
modeled systems. A systematic approach to deriving timed Petri nets models
of cluster tools is proposed which is based on formal description of tool
configurations and changes of configurations of the tool. The approach
can be used for modeling and evaluation of a large variety of cluster tools.
Keywords:
Cluster tools, manufacturing systems, semiconductor manufacturing, Petri nets,
performance evaluation.
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