Modeling and performance evaluation of cluster tools using Petri nets - basic models

Zuberek, W.M.

in: Emerging Technologies, Robotics and Control Systems, vol.3, ed. S. Pennacchio; International Society for Advanced Research, Palermo, Italy, pp.59-67, 2009 (ISBN 978-88-901928-7-6).


A cluster tool is an integrated manufacturing system consisting of process, transport, and cassette modules, mechanically linked together, that is used in manufacturing of semiconductor chips. Because of high throughput requirements, cluster tools perform a number of activities concurrently. Petri nets are formal models developed specifically for representation of concurrent activities and for their coordination. In timed nets, the durations of modeled activities are represented by occurrence times associated with transitions, and this allows to study the performance characteristics of the modeled systems. A systematic approach to deriving timed Petri nets models of cluster tools is proposed which is based on formal description of tool configurations and changes of configurations of the tool. The approach can be used for modeling and evaluation of a large variety of cluster tools.


Cluster tools, manufacturing systems, semiconductor manufacturing, Petri nets, performance evaluation.


Available in pdf.