Timed Petri net models of multi-robot cluster tools
Proc. IEEE Conf. on Systems, Man, and Cybernetics; Tucson, AZ,
7-10 October 2001, pp.2729-2734.
A systematic approach to modeling the stationary behavior of cluster tools
by timed Petri nets is presented. The performance of derived models is
evaluated by structural methods (place invariants), without the exhaustive
generation of the state space. Multiple robots are introduced to reduce the
limitations of "transport bound" tools. Simple examples are provided to
illustrate the proposed approach.
Timed Petri nets, cluster tools, multi-robot tools, performance analysis,
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