Timed Petri net models of multi-robot cluster tools

Zuberek, W.M.

Proc. IEEE Conf. on Systems, Man, and Cybernetics; Tucson, AZ, 7-10 October 2001, pp.2729-2734.

Abstracts:

A systematic approach to modeling the stationary behavior of cluster tools by timed Petri nets is presented. The performance of derived models is evaluated by structural methods (place invariants), without the exhaustive generation of the state space. Multiple robots are introduced to reduce the limitations of "transport bound" tools. Simple examples are provided to illustrate the proposed approach.

Keywords:

Timed Petri nets, cluster tools, multi-robot tools, performance analysis, place invariants.

References:

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