Timed Petri nets in modeling and analysis of cluster tools
IEEE Transactions on Robotics and Automation, vol.17, no.5,
Timed Petri nets are used as models of cluster tools representing the flow
of wafers through the chambers of the tool as well as sequences of actions
performed by the robotic transporter. Since the durations of all activities
are also represented in the model, performance characteristics can be derived
from the model for steady-state as well as transient behaviors. The
performance of single-blade tools is compared with that of dual-blade tools.
The effects of multiple loadlocks, redundant chambers and multiple robots
are discussed and analyzed. Modeling of wafer routings with chamber revisiting
and processing of wafers of multiple types is also briefly discussed.
Cluster tools, performance analysis, steady-state behavior, transient behavior,
timed Petri nets, structural analysis, place invariants, net transformations.
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DAIMI, Department of Computer Science at Aarhus University, Denmark, maintains
a database of tools for analysis of Petri nets:
Available in pdf